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Excimer laser annealing of sol-gel derived PZT thin films

Authors

Do Young Ho; Kang Min Gyu; Oh Seung min; KANG, CHONG YUN; YOON, SEOK JIN

Citation

한국전기전자재료학회 2010년도 하계학술대회

Keywords

Excimer laser annealing; PZT; Dielectric; Sol-gel

URI

https://pubs.kist.re.kr/handle/201004/98496

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KIST Conference Paper > Others

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