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Low Resonance Frequency Piezoelectric MEMS Harvester with Shear Mode

Authors

Song, Hyun - Cheol; Lee Woon Hee; KANG, CHONG YUN; YOON, SEOK JIN

Citation

International Workshop on Piezoelectric Materials and Applications in Actuators, pp.34

Keywords

MEMS; Piezoelectric; shear mode; spiral; energy harvesting

URI

https://pubs.kist.re.kr/handle/201004/98613

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KIST Conference Paper > Others

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