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매설층을 갖는 박막 트랜지스터 및 그 제조 방법

Author

정유진; 강종윤; 장호원; 이상렬

Assignee

한국과학기술연구원

Regitration Date

2011-11-24

Registration No.

1088366

Application Date

2009-11-03

Application No.

2009-0105417

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/98798

Appears in Collections:

KIST Patent > 2009

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