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dc.contributor.authorHer Eun kyu-
dc.contributor.authorCha Tae-Gon-
dc.contributor.authorMyoung-Woon Moon-
dc.contributor.authorLee, Kwang Ryeol-
dc.contributor.author오규환-
dc.contributor.author김호영-
dc.date.accessioned2024-01-12T23:06:22Z-
dc.date.available2024-01-12T23:06:22Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/99064-
dc.languageEnglish-
dc.subjectsi nanowire-
dc.subjectplasma-
dc.subjectnanopattern-
dc.subjectbiomimetic-
dc.subjectsuperhydrophobic-
dc.subjectPACVD-
dc.subjectSi nanowire-
dc.subjecthierarchical structure-
dc.titleFabrication of superhydrophobic Si nanowire patterned surfaces using CF4 plasma-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationInternational Symposium on Nature Inspired Technology(ISNIT2010)-
dc.citation.titleInternational Symposium on Nature Inspired Technology(ISNIT2010)-
dc.citation.conferencePlaceKO-
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