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dc.contributor.authorJONG-KEUK, PARK-
dc.contributor.authorBaik, Young Joon-
dc.contributor.authorLee, Wook Seong-
dc.date.accessioned2024-01-12T23:06:59Z-
dc.date.available2024-01-12T23:06:59Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/99110-
dc.languageEnglish-
dc.subjectnanoscale multilayered coating-
dc.subjectcrystallization-
dc.subjectamorphous nitride phase-
dc.subjecthardness-
dc.subjectmetal nitride-
dc.titleCrystallization behavior of amorphous SiNx, BN and CNx phase with transition metal nitride (TiAlN and ZrN) layer in nanoscale multilayered coating-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitation12th International Conference on Plasma Surface Engineering (PSE 2010)-
dc.citation.title12th International Conference on Plasma Surface Engineering (PSE 2010)-
dc.citation.conferencePlaceGW-
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