DSpace at KISTKIST Patent2002

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dc.contributor.author이중기-
dc.contributor.author조병원-
dc.contributor.author박달근-
dc.contributor.author최용락-
dc.contributor.author우주만-
dc.date.accessioned2024-01-12T23:32:36Z-
dc.date.available2024-01-12T23:32:36Z-
dc.date.issued2005-03-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/99377-
dc.title전자 싸이클로트론 공명 플라즈마와 펄스형 직류 바이어스결합형 상온 화학 증착 시스템 및 이를 이용한 금속복합막 제조방법-
dc.typePatent-
dc.date.registration2005-03-29-
dc.date.application2002-06-20-
dc.identifier.patentRegistrationNumber481685-
dc.identifier.patentApplicationNumber2002-0034635-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2002
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