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Processing technique for SWNT-based sensors arrays

Authors

Kim Kyeong Heon; Jang Chi Woong; T. G. Kim; Lee, Seok; Kim, Sun Ho; Byun, Young Tae

Citation

International Conference on Electronic Materials 2010 presented by International Union of Materials Research Societies(IUMRS-ICEM 2010), pp.126

Keywords

SWCNT; sensor array; FET; O2 plasma

URI

https://pubs.kist.re.kr/handle/201004/99507

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KIST Conference Paper > Others

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