이온빔을 이용한 재료의 표면 처리 장치

Author
고석근조정최원국정형진
Assignee
한국과학기술연구원
Regitration Date
2005-01-11
Registration No.
6,841,789
Application Date
2001-09-21
Application No.
09/957,896
Country
US
URI
https://pubs.kist.re.kr/handle/201004/99933
Appears in Collections:
KIST Patent > 2001
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