이온빔을 이용한 재료의 표면 처리 장치

Author
고석근조정최원국정형진
Assignee
한국과학기술연구원
Regitration Date
2008-02-27
Registration No.
1036210
Application Date
2008-02-12
Application No.
98959256.3
URI
https://pubs.kist.re.kr/handle/201004/99937
Appears in Collections:
KIST Patent > 2008
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