Showing results 1 to 3 of 3
Issue Date | Title | Author(s) |
---|---|---|
- | Characteristics of tungsten boron nitride thin film by plasma enhanced chemical vapor deposition | 김동준; Kim Yong Tae; 박종완 |
- | Effect of NH3 plasma treatment on improvement of reliability of W-B-N/HSQ thin films | 김동준; 심현상; Kim Yong Tae; 박종완 |
2000-09 | Thermal stability of tungsten-boron-nitride thin film as diffusion barrier | Park, YK; Kim, SI; Kim, YT; Lee, CW |