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Showing results 1 to 4 of 4

Issue DateTitleAuthor(s)
-Actinic EUV Mask Inspection using Coherent EUV Light from High Harmonic GenerationMOON BYUNGHYUCK; Yong Soo Kim; Kim, Yong Tae; Hamin Sung; Jomsool Kim; Byeong-Kwon Ju; Jhon, Young Min
-CD Measurements of EUV Mask using a Coherent Scattering Microscope Mask Inspection ToolKim Yong Soo; Park June; 성하민; 김점술; 이승범; 조현우; Park, Min-Chul; Cho, Woon Jo; Kim, Yong Tae; 이주한; Jhon, Young Min
-Development of Coherent Scattering Microscopy Mask Inspection System using a Coherent EUV Light SourceJhon, Young Min; Kim Yong Soo; Ahn Joonmo; Lee, Ju han; Sung, Hamin; Kim, Jomsool; 이승범; 조현우; Park, Min-Chul; Cho, Woon Jo; Kim, Yong Tae
-Output Characteristics of a Coherent EUV Light Source for EUV Mask InspectionJhon, Young Min; Kim Yong Soo; Ahn Joonmo; Sung, Hamin; Cho, Woon Jo; Park, Min-Chul; Kim, Jomsool; Lee, Ju Han; KIM, JAE HUN; MINAH SEO; Lee, Seok; Kim, Yong Tae
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