Showing results 1 to 2 of 2
Issue Date | Title | Author(s) |
---|---|---|
2003-01 | Effect of glycine adsorption on polishing of silicon nitride in chemical mechanical planarzation process | 김태은; 임건자; 이종호; 김주선; 이해원; 임대순 |
2003-02 | Effects of synthetic temperature and suspension stability of CeO₂abrasive on CMP characteristics | 임건자; 김태은; 이종호; 김주선; 이해원; 현상훈 |