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Effect of glycine adsorption on polishing of silicon nitride in chemical mechanical planarzation process

Other Titles

CeO₂슬러리에서 glycine의 흡착이 질화규소 박막의 연마특성에 미치는 영향

Authors

김태은; 임건자; 이종호; 김주선; 이해원; 임대순

Issue Date

2003-01

Publisher

한국세라믹학회

Citation

한국세라믹학회지 (Journal of the Korean Ceramic Society), v.40, no.1, pp.77 - 80

Keywords

chemical mechanical planarization

ISSN

1229-7801

URI

https://pubs.kist.re.kr/handle/201004/138917

Appears in Collections:

KIST Article > 2003

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