Showing results 1 to 2 of 2
Issue Date | Title | Author(s) |
---|---|---|
- | Design and Construction of an EUV Grating Spectrometer for the High Harmonic Generation at 13.5 nm | 김점술; 함용희; 정재룡; 권승호; Sung Hamin; Kim Yong Soo; Jhon, Young Min |
- | Development of Coherent EUV Light Source for EUV Metrology | Sung Hamin; Kim Yong Soo; Cho, Woon Jo; Park, Min-Chul; 함용희; 김점술; KIM, JAE HUN; Woo, Deok Ha; Lee, Seok; 이주한; Kim, Yong Tae; Jhon, Young Min |