Showing results 1 to 5 of 5
| Issue Date | Title | Author(s) |
|---|---|---|
| - | Fabrication of 3D MEMS antenna array for infrared detector using novel UV-lithography apparatus, plastic micro machining and micro assembly technique | JONG-YEON PARK; KIM GEUN TAE; Moon Sung Wook; PARK JEONG HO |
| - | Fabrication of 3D MEMS antenna for IR detector using novel UV-lithography, plastic micro machining and mesh structure bonding technique | JONG-YEON PARK; KIM GEUN TAE; Moon Sung Wook; PARK JEONG HO |
| - | HARS (High Aspect Ratio Structure) fabrication for 3D MEMS antenna array using novel photolithography apparatus | JONG-YEON PARK; KIM GEUN TAE; KIM JINSEOK; 한용희; Moon Sung Wook; PARK JEONG HO |
| - | Surface micromachined microbolometer with the optimized VOx bolometric layer based on the sandwich structure of the V2O5/V/V2O5 | Moon Sung Wook; 한용희; KIM GEUN TAE; Nguyen Chi-Anh; Shin Hyun Joon |
| - | V₂O5/V/V₂O5 based uncooled infrared detector by MEMS technology | 한용희; 허재성; 최인훈; KIM GEUN TAE; Shin Hyun Joon; 치엔; Moon Sung Wook |