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Showing results 1 to 3 of 3

Issue DateTitleAuthor(s)
-Algorithm for EUV Mask Actinic CD Measurement using Scattered LightCho Jung-gyn; Kim Ki Hyuk; 이동수; Park, Min-Chul; Jhon, Young Min; Kim, Yong Tae
-Coherent scattering stereoscopic microscopy for mask inspection of extreme ultra-violet lithographyKim Ki Hyuk; Cho Jung-gyn; Park, Min-Chul; Ju, Byeong-Kwon; Cho Sung-jin; Son, Jung-Young
-Development of 3D Display SimulatorKim Ki Hyuk; LEE HO DONG; Park, Min Chul
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