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Algorithm for EUV Mask Actinic CD Measurement using Scattered Light

Other Titles

산란광을 이용한 EUV 마스크 Actinic CD 측정 알고리즘

Authors

Cho Jung-gyn; Kim Ki Hyuk; 이동수; Park, Min-Chul; Jhon, Young Min; Kim, Yong Tae

Citation

차세대 리소그래피 학술대회

URI

https://pubs.kist.re.kr/handle/201004/94066

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KIST Conference Paper > Others

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