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KIST Conference Paper
2005
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Results 1-5 of 5 (Search time: 0.002 seconds).
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2005-05-15
Silicon Nitride Cantilever Arrays Integrated with Si Heater and Piezoelectric Sensor for SPM DATA Storage Applications
CHO, IL JOO
2005-06-15
A Shunt-Type RF MEMS Switch at 3.3V Operation Actuated by Lorentz Force and Electrostatic Hold
CHO, IL JOO
2005-06-15
An Electromagnetically-Actuated Polymer Micro-Pen for Picoliter Biological Assay Patterning
CHO, IL JOO
2005-01-15
A Low-Voltage Push-Pull SPDT RF MEMS Switch Operated by Combination of Electromagnetic Actuation and Electrostatic Hold
CHO, IL JOO
2005-01-15
Integrated nitride cantilever array with Si heaters and piezoelectric detectors for nano-data-storage application
CHO, IL JOO
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2005
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