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Fabrication scheme of a high resolution and high aspect ratio UV-nanoimprint mold

Authors

Lim Ki Pil; Wi Jung-Sub; Nam Sung-Wook; Park Soo-Yeon; Lee Jae-Jong; Kim Ki-Bum

Citation

2010 MRS spring

Keywords

nanoimprint; high aspect ratio; high resolution; UV-NIL

URI

https://pubs.kist.re.kr/handle/201004/100301

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KIST Conference Paper > Others

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