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Fabrication of patterned phase change pillars by laser interference lithography

Authors

Lee Eui-Bok; Ki Young Dong; Jinn Il Choi; Byoeng Kwon Ju; Kim, Yong Tae

Citation

The 2nd International Conference on Microelectronics and Plasma Technology, pp.172

Keywords

phase change pillars; lithography

URI

https://pubs.kist.re.kr/handle/201004/100789

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KIST Conference Paper > Others

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