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Spiral type Piezoelectric MEMS power generator with shear mode

Authors

Song, Hyun - Cheol; KANG, CHONG YUN; YOON, SEOK JIN; Kim Hyung Chan

Citation

2009 IEEE International Ultrasonics Symposium, pp.589 - 590

Keywords

energy harvesting; piezoelectrics; MEMS; spiral structure; shear mode

URI

https://pubs.kist.re.kr/handle/201004/100916

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KIST Conference Paper > Others

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