Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Lee Seung-min | - |
| dc.contributor.author | Tae-Yeon Seong | - |
| dc.contributor.author | JONG-KEUK, PARK | - |
| dc.date.accessioned | 2024-01-13T02:00:51Z | - |
| dc.date.available | 2024-01-13T02:00:51Z | - |
| dc.date.created | 2021-09-29 | - |
| dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/101145 | - |
| dc.language | English | - |
| dc.subject | a-Si | - |
| dc.subject | sputtering | - |
| dc.subject | crystallization | - |
| dc.subject | thin film | - |
| dc.title | Crystallization behavior of amorphous silicon thin film deposited by DC/RF magnetron sputtering with substrate bias | - |
| dc.type | Conference | - |
| dc.description.journalClass | 1 | - |
| dc.identifier.bibliographicCitation | AEPSE2009 | - |
| dc.citation.title | AEPSE2009 | - |
| dc.citation.conferencePlace | KO | - |
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