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Crystallization behavior of amorphous silicon thin film deposited by DC/RF magnetron sputtering with substrate bias

Authors

Lee Seung-min; Tae-Yeon Seong; JONG-KEUK, PARK

Citation

AEPSE2009

Keywords

a-Si; sputtering; crystallization; thin film

URI

https://pubs.kist.re.kr/handle/201004/101145

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KIST Conference Paper > Others

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