Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Pham Duc Cuong | - |
dc.contributor.author | Arvind Singh | - |
dc.contributor.author | Na, Kyounghwan | - |
dc.contributor.author | Yang Sung Wook | - |
dc.contributor.author | Yoon, Eui Sung | - |
dc.date.accessioned | 2024-01-13T02:03:24Z | - |
dc.date.available | 2024-01-13T02:03:24Z | - |
dc.date.created | 2021-09-29 | - |
dc.identifier.uri | https://pubs.kist.re.kr/handle/201004/101328 | - |
dc.language | English | - |
dc.subject | topographical modification | - |
dc.subject | Z-dol | - |
dc.subject | friction | - |
dc.subject | Adhesion | - |
dc.subject | AFM | - |
dc.subject | Micro/nano | - |
dc.subject | Nanopatterns | - |
dc.subject | MEMS | - |
dc.subject | Tribology | - |
dc.title | Topographically-Chemically Modified Silicon Surfaces as Tribological Candidates for Miniaturized (MEMS) Devices | - |
dc.type | Conference | - |
dc.description.journalClass | 1 | - |
dc.identifier.bibliographicCitation | ICMDT2009 | - |
dc.citation.title | ICMDT2009 | - |
dc.citation.conferencePlace | KO | - |
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