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dc.contributor.authorPham Duc Cuong-
dc.contributor.authorArvind Singh-
dc.contributor.authorNa, Kyounghwan-
dc.contributor.authorYang Sung Wook-
dc.contributor.authorYoon, Eui Sung-
dc.date.accessioned2024-01-13T02:03:24Z-
dc.date.available2024-01-13T02:03:24Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/101328-
dc.languageEnglish-
dc.subjecttopographical modification-
dc.subjectZ-dol-
dc.subjectfriction-
dc.subjectAdhesion-
dc.subjectAFM-
dc.subjectMicro/nano-
dc.subjectNanopatterns-
dc.subjectMEMS-
dc.subjectTribology-
dc.titleTopographically-Chemically Modified Silicon Surfaces as Tribological Candidates for Miniaturized (MEMS) Devices-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationICMDT2009-
dc.citation.titleICMDT2009-
dc.citation.conferencePlaceKO-
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