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Topographically-Chemically Modified Silicon Surfaces as Tribological Candidates for Miniaturized (MEMS) Devices

Authors

Pham Duc Cuong; Arvind Singh; Na, Kyounghwan; Yang Sung Wook; Yoon, Eui Sung

Citation

ICMDT2009

Keywords

topographical modification; Z-dol; friction; Adhesion; AFM; Micro/nano; Nanopatterns; MEMS; Tribology

URI

https://pubs.kist.re.kr/handle/201004/101328

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KIST Conference Paper > Others

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