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ALD법으로 성장시킨 ZnO 박막의 RTA 처리에 따른 전기적 특성변화

Authors

장삼석; 김범준; Ji Hun Park; 김영석; 변동진

Issue Date

2009-05

Citation

한국재료학회

Keywords

ZnO; RTA; ALD

URI

https://pubs.kist.re.kr/handle/201004/101436

Appears in Collections:

KIST Conference Paper > Others

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