DSpace at KISTKIST Conference PaperOthers

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dc.contributor.authorChae youn mee-
dc.contributor.authorLee, Soo Hyun-
dc.contributor.authorKang, Ji Yoon-
dc.contributor.authorPark, Jung Ho-
dc.date.accessioned2024-01-13T03:02:24Z-
dc.date.available2024-01-13T03:02:24Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/101787-
dc.languageEnglish-
dc.subjectMass sensor-
dc.subjectbridge type-
dc.subjectPZT-
dc.titleFabrication of Doubly Clamped Piezoelectric Resonator with 3㎛ width-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitationKMEMS 2008-
dc.citation.titleKMEMS 2008-
dc.citation.conferencePlaceKO-
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