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Fabrication of Doubly Clamped Piezoelectric Resonator with 3㎛ width

Authors

Chae youn mee; Lee, Soo Hyun; Kang, Ji Yoon; Park, Jung Ho

Citation

KMEMS 2008

Keywords

Mass sensor; bridge type; PZT

URI

https://pubs.kist.re.kr/handle/201004/101787

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KIST Conference Paper > Others

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