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A transmission electron microscopy study on the crystallization of Sb-Se-Te thin films deposited by rf sputtering method

Authors

Jong Moon Youn; Chang Woo Sun; Jeong Yong Lee; Kim, Yong Tae

Citation

The 14th International Symposium on the Physics of Semiconductor and Applications (ISPSA), pp.308

Keywords

TEM; phase change memory; PRAM; crystallization; Sb-Se-Te

URI

https://pubs.kist.re.kr/handle/201004/101930

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KIST Conference Paper > Others

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