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dc.contributor.authorSeungHun LEE-
dc.contributor.authorChu sung il-
dc.contributor.authorKim, Jin Hyeck-
dc.contributor.authorSeo Ho Won-
dc.contributor.authorDong-Chul Han-
dc.contributor.authorMoon, Sung Wook-
dc.date.accessioned2024-01-13T06:04:00Z-
dc.date.available2024-01-13T06:04:00Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/103507-
dc.languageEnglish-
dc.subjectMEMS-
dc.subjectProbe card-
dc.subjectElectro-plating-
dc.subjectFEM-
dc.subjectMicro-spring-
dc.subjectArea array-
dc.titleReliable design and characterization of MEMS probe tip-
dc.title.alternative신뢰성을 갖는 MEMS 프로브 팁의 설계 및 특성평가-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation대한기계학회 2007년도 춘계학술대회-
dc.citation.title대한기계학회 2007년도 춘계학술대회-
dc.citation.conferencePlaceKO-
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