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Reliable design and characterization of MEMS probe tip

Other Titles

신뢰성을 갖는 MEMS 프로브 팁의 설계 및 특성평가

Authors

SeungHun LEE; Chu sung il; Kim, Jin Hyeck; Seo Ho Won; Dong-Chul Han; Moon, Sung Wook

Citation

대한기계학회 2007년도 춘계학술대회

Keywords

MEMS; Probe card; Electro-plating; FEM; Micro-spring; Area array

URI

https://pubs.kist.re.kr/handle/201004/103507

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KIST Conference Paper > Others

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