DSpace at KISTKIST Conference PaperOthers

Full metadata record

DC Field Value Language
dc.contributor.authorKim Moo Hyun-
dc.contributor.authorLee, Byung Chul-
dc.contributor.authorC. Jegatha-
dc.contributor.authorKim Sang Kyung-
dc.contributor.authorShin, Hyun Joon-
dc.contributor.authorKim, Jung Sik-
dc.contributor.authorMoon, Sung Wook-
dc.date.accessioned2024-01-13T06:31:31Z-
dc.date.available2024-01-13T06:31:31Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/103593-
dc.languageEnglish-
dc.subject무전해도금-
dc.subject선택적 습식식각-
dc.subject나노에칭 공정-
dc.subjectMEMS-
dc.subjectNEMS-
dc.subjectelectroless plating-
dc.subjectselective wet etching-
dc.subjectetching process-
dc.titleLarge area 3D nanoscale metal etching process-
dc.title.alternative대면적 3D 나노스케일 금속 에칭 방법-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation제 9회 한국 MEMS 학술대회 논문집(2007년 4월 5-7일), pp.642 - 645-
dc.citation.title제 9회 한국 MEMS 학술대회 논문집(2007년 4월 5-7일)-
dc.citation.startPage642-
dc.citation.endPage645-
dc.citation.conferencePlaceKO-
Appears in Collections:
KIST Conference Paper > Others
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML
Show Simple Item Record

qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE