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Direct-Patterned PZT Microcantilever Using Photosensitive Sol-Gel Method

Authors

KANG GHI-YUUN; 박형호; Yoon, Dae Sung; Kim, Tae Song

Citation

ISIF 2006

Keywords

캔틸레버; 솔젤; PZT

URI

https://pubs.kist.re.kr/handle/201004/103696

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KIST Conference Paper > Others

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