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dc.contributor.authorJang Hee-Yeon-
dc.contributor.authorJeung-hyun Jeong-
dc.contributor.authorJONG-KEUK, PARK-
dc.contributor.authorDae-Soon Lim-
dc.date.accessioned2024-01-13T07:03:06Z-
dc.date.available2024-01-13T07:03:06Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/103981-
dc.subjectBN-
dc.subjectcBN content-
dc.subjectoxygen content-
dc.subjectstress-
dc.title.alternative비대칭 마그네트론 스퍼터링으로 합성한 입방정 BN 박막의 기계적 성질에 미치는 O2 첨가의 영향-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation대한금속,재료학회 추계학술대회-
dc.citation.title대한금속,재료학회 추계학술대회-
dc.citation.conferencePlaceKO-
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