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Other Titles

비대칭 마그네트론 스퍼터링으로 합성한 입방정 BN 박막의 기계적 성질에 미치는 O2 첨가의 영향

Authors

Jang Hee-Yeon; Jeung-hyun Jeong; JONG-KEUK, PARK; Dae-Soon Lim

Citation

대한금속,재료학회 추계학술대회

Keywords

BN; cBN content; oxygen content; stress

URI

https://pubs.kist.re.kr/handle/201004/103981

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KIST Conference Paper > Others

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