Resonant characteristic of the PZT thin film microcantilever with mass sensitivity of femto-gram level for biomolecule detection

Authors
Chun Dong WonHwang Kyo SeonJeong Hoon LeeKilho EomCha Byung HakWoo Young LeeYoon, Dae SungKim, Tae Song
Citation
Korea MEMS Conference
URI
https://pubs.kist.re.kr/handle/201004/104024
Appears in Collections:
KIST Conference Paper > Others
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