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dc.contributor.authorMi Jung-
dc.contributor.authorLee, Seok-
dc.contributor.authorByun, Young Tae-
dc.contributor.authorJhon, Young Min-
dc.contributor.authorKim, Sun Ho-
dc.contributor.authorMho,Sun-il-
dc.contributor.authorWoo, Deok Ha-
dc.date.accessioned2024-01-13T07:30:37Z-
dc.date.available2024-01-13T07:30:37Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/104062-
dc.languageEnglish-
dc.subjectIII-V Semiconductor-
dc.subjectNanohole Array-
dc.subjectNanoporous Alumina Mask-
dc.subjectICP-RIE-
dc.titleFabrication of Size Controlled Nanohole Array on III-V Semiconductor substrate by ICP-RIE using nanoporous alumina mask-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationIUMRS-ICA-2006-
dc.citation.titleIUMRS-ICA-2006-
dc.citation.conferencePlaceKO-
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