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Fabrication of Size Controlled Nanohole Array on III-V Semiconductor substrate by ICP-RIE using nanoporous alumina mask

Authors

Mi Jung; Lee, Seok; Byun, Young Tae; Jhon, Young Min; Kim, Sun Ho; Mho,Sun-il; Woo, Deok Ha

Citation

IUMRS-ICA-2006

Keywords

III-V Semiconductor; Nanohole Array; Nanoporous Alumina Mask; ICP-RIE

URI

https://pubs.kist.re.kr/handle/201004/104062

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KIST Conference Paper > Others

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