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Photolithographic Fluorescent Patterning with Polymers Having Quinizarin Dye Precursors Based on Chemical Amplification by Dry Process

Authors

Ahn, Kwang-Duk; KANG, JONG HEE

Citation

IUPAC International Symposium on Advanced Polymers for Emerging Technologies, PSK30, pp.184

Keywords

Fluorescent Patterning; polymer photoimaging; Quinizarin Dye Precursors; Dry Process; protected quinizarin styrene; Photolithography; Chemical Amplification

URI

https://pubs.kist.re.kr/handle/201004/104148

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KIST Conference Paper > Others

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