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Characteristics of carbon films deposited by RF plasma sputtering of the C60 target

Authors

Oleg M. Vovk; Lee, Joong Kee; Song Jin O

Citation

IUMRS-ICA-2006

Keywords

carbon film; Rf sputtering; deposition; C60

URI

https://pubs.kist.re.kr/handle/201004/104152

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KIST Conference Paper > Others

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