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dc.contributor.authorSON JUN HYUK-
dc.contributor.authorSeungHun LEE-
dc.contributor.authorCheung Il Jin-
dc.contributor.authorKIM HYUNG WON-
dc.contributor.authorKim, Kwang Ho-
dc.contributor.authorShim, Jae Wan-
dc.contributor.authorShin, Hyun Joon-
dc.contributor.authorSung-Woo Hwang-
dc.contributor.authorMoon, Sung Wook-
dc.date.accessioned2024-01-13T08:31:21Z-
dc.date.available2024-01-13T08:31:21Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/104645-
dc.languageEnglish-
dc.titleImprovement of linearity and Resolution in Capacitive Micro Tilt Sensor by Using Modified Comb Finger Shape-
dc.title.alternative콤 모양의 개선에 의한 정전형 마이크로 틸트센서의 선형성과 해상도 향상-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation제7회 한국 MEMS 학술 대회 초록집-
dc.citation.title제7회 한국 MEMS 학술 대회 초록집-
dc.citation.conferencePlaceKO-
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