KIST Library Institutional Repository

null

Other Titles

Pulse Plasma Assisted Atomic Layer deposition 장치의 제작과 특성

Authors

Kim, Yong Tae; Park Ji Ho; 김희준; 이창우

Citation

한국 반도체 및 디스플레이 장비 학회 2005년도 추계학술대회

URI

https://pubs.kist.re.kr/handle/201004/104759

Appears in Collections:

KIST Conference Paper > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML