DSpace at KIST: Depending on Polishing Conditions of GaAs/Si3N4/SiO2/Si Wafers to Compare with Bonding Forces

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DC Field	Value	Language
dc.contributor.author	PARK JONG KOOK	-
dc.contributor.author	Kim, Sun Ho	-
dc.contributor.author	Jin Woo Park	-
dc.contributor.author	Byun, Young Tae	-
dc.date.accessioned	2024-01-13T08:33:44Z	-
dc.date.available	2024-01-13T08:33:44Z	-
dc.date.created	2021-09-29	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/104810	-
dc.language	English	-
dc.subject	연마	-
dc.subject	GaAs/Si3N4/SiO2/Si	-
dc.subject	웨이퍼의 접합력	-
dc.title	Depending on Polishing Conditions of GaAs/Si3N4/SiO2/Si Wafers to Compare with Bonding Forces	-
dc.title.alternative	연마 조건에 따른 GaAs/Si3N4/SiO2/Si 웨이퍼의 접합력 비교	-
dc.type	Conference	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	한국광학회 2005년도 하계학술발표회, pp.46 - 47	-
dc.citation.title	한국광학회 2005년도 하계학술발표회	-
dc.citation.startPage	46	-
dc.citation.endPage	47	-
dc.citation.conferencePlace	KO	-

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