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dc.contributor.authorPARK JONG KOOK-
dc.contributor.authorKim, Sun Ho-
dc.contributor.authorJin Woo Park-
dc.contributor.authorByun, Young Tae-
dc.date.accessioned2024-01-13T08:33:50Z-
dc.date.available2024-01-13T08:33:50Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/104817-
dc.languageEnglish-
dc.subject반도체 광소자-
dc.subjectGaAs/SiNx/SiO2/Si-
dc.subject웨이퍼 직접 접합-
dc.titleOptimized Condition for Direct Wafer Bonding of GaAs/SiNx/SiO2/Si for Hybrid Semiconductor Optical Devices-
dc.title.alternative반도체 광소자 제작을 위한 GaAs/SiNx/SiO2/Si 웨이퍼 직접 접합의 최적화-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation제 12회 광전자 및 광통신 학술회의(COOC 2005), pp.7 - 8-
dc.citation.title제 12회 광전자 및 광통신 학술회의(COOC 2005)-
dc.citation.startPage7-
dc.citation.endPage8-
dc.citation.conferencePlaceKO-
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