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Optimized Condition for Direct Wafer Bonding of GaAs/SiNx/SiO2/Si for Hybrid Semiconductor Optical Devices

Other Titles

반도체 광소자 제작을 위한 GaAs/SiNx/SiO2/Si 웨이퍼 직접 접합의 최적화

Authors

PARK JONG KOOK; Kim, Sun Ho; Jin Woo Park; Byun, Young Tae

Citation

제 12회 광전자 및 광통신 학술회의(COOC 2005), pp.7 - 8

Keywords

반도체 광소자; GaAs/SiNx/SiO2/Si; 웨이퍼 직접 접합

URI

https://pubs.kist.re.kr/handle/201004/104817

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KIST Conference Paper > Others

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