DSpace at KIST: Study on Deposited Films of SiO2 and Direct Wafer Bonding to Fabricate GaAs/SiO2/Si Wafers

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DC Field	Value	Language
dc.contributor.author	PARK JONG KOOK	-
dc.contributor.author	Kim, Sun Ho	-
dc.contributor.author	Jin Woo Park	-
dc.contributor.author	Byun, Young Tae	-
dc.date.accessioned	2024-01-13T08:33:51Z	-
dc.date.available	2024-01-13T08:33:51Z	-
dc.date.created	2021-09-29	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/104818	-
dc.language	English	-
dc.subject	GaAs/SiO2/Si 웨이퍼	-
dc.subject	SiO2 박막 형성	-
dc.subject	웨이퍼 직접 접합	-
dc.title	Study on Deposited Films of SiO2 and Direct Wafer Bonding to Fabricate GaAs/SiO2/Si Wafers	-
dc.title.alternative	GaAs/SiO2/Si 웨이퍼 제작을 위한 SiO2 박막 형성과 웨이퍼 직접 접합에 관한 연구	-
dc.type	Conference	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	한국광학회 제16회 정기총회 및 2005년도 동계학술발표회, pp.170 - 171	-
dc.citation.title	한국광학회 제16회 정기총회 및 2005년도 동계학술발표회	-
dc.citation.startPage	170	-
dc.citation.endPage	171	-
dc.citation.conferencePlace	KO	-

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