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Study on Deposited Films of SiO2 and Direct Wafer Bonding to Fabricate GaAs/SiO2/Si Wafers

Other Titles

GaAs/SiO2/Si 웨이퍼 제작을 위한 SiO2 박막 형성과 웨이퍼 직접 접합에 관한 연구

Authors

PARK JONG KOOK; Kim, Sun Ho; Jin Woo Park; Byun, Young Tae

Citation

한국광학회 제16회 정기총회 및 2005년도 동계학술발표회, pp.170 - 171

Keywords

GaAs/SiO2/Si 웨이퍼; SiO2 박막 형성; 웨이퍼 직접 접합

URI

https://pubs.kist.re.kr/handle/201004/104818

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KIST Conference Paper > Others

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