DSpace at KIST: Study on direct wafer bonding for GaAs-on-Si wafers using SiO2 Oxide films

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DC Field	Value	Language
dc.contributor.author	PARK JONG KOOK	-
dc.contributor.author	Kim, Sun Ho	-
dc.contributor.author	Jin Woo Park	-
dc.contributor.author	Byun, Young Tae	-
dc.date.accessioned	2024-01-13T08:33:53Z	-
dc.date.available	2024-01-13T08:33:53Z	-
dc.date.created	2021-09-29	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/104820	-
dc.language	English	-
dc.subject	산화막	-
dc.subject	GaAs-on-Si	-
dc.subject	웨이퍼의 직접 접합	-
dc.title	Study on direct wafer bonding for GaAs-on-Si wafers using SiO2 Oxide films	-
dc.title.alternative	SiO2 산화막을 이용한 GaAs-on-Si 웨이퍼의 직접 접합에 관한 연구	-
dc.type	Conference	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	PC04 Photonics Conference 2004, pp.FP42	-
dc.citation.title	PC04 Photonics Conference 2004	-
dc.citation.startPage	FP42	-
dc.citation.conferencePlace	KO	-

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