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Study on direct wafer bonding for GaAs-on-Si wafers using SiO2 Oxide films

Other Titles

SiO2 산화막을 이용한 GaAs-on-Si 웨이퍼의 직접 접합에 관한 연구

Authors

PARK JONG KOOK; Kim, Sun Ho; Jin Woo Park; Byun, Young Tae

Citation

PC04 Photonics Conference 2004, pp.FP42

Keywords

산화막; GaAs-on-Si; 웨이퍼의 직접 접합

URI

https://pubs.kist.re.kr/handle/201004/104820

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KIST Conference Paper > Others

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