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dc.contributor.authorLEE SEUNG HYEOB-
dc.contributor.authorKim Tae Young-
dc.contributor.authorSEUNG CHEOL, LEE-
dc.contributor.authorY-C. Chung-
dc.contributor.authorD. W. Brenner-
dc.contributor.authorLee, Kwang Ryeol-
dc.date.accessioned2024-01-13T08:34:06Z-
dc.date.available2024-01-13T08:34:06Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/104835-
dc.languageEnglish-
dc.subjectMD-
dc.subjectcarbon-
dc.subjectstructure-
dc.subjectstress-
dc.subjecttetrahedral amorphous carbon-
dc.subjectmolecular dynamics simulation-
dc.subjectDispersed Incident Energy-
dc.subjectcompressive residual stress-
dc.titleThe Structure and Properties of ta-C Film with Dispersion of Incident Beam Energy-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationInt. Conf. Comp. Nanotechnol.-
dc.citation.titleInt. Conf. Comp. Nanotechnol.-
dc.citation.conferencePlaceUS-
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